专利名称：METHOD AND APPARATUS FOR
PRODUCING CERAMIC-BASED ELECTRONICCOMPONENTS
申请号：EP94920126申请日：19940609公开号：EP0702618A4公开日：19960417
摘要：A method of heat treating ceramic-based electronic components by providing afurnace fixture adapted to support the ceramic-based electronic components which ismade from a substrate selected from the group consisting of silicon carbide (SiC),cordierite (2MgO.2Al2O3.5SiO2), mullite (3Al2O3.2SiO2), stabilized zirconia, magnesiumoxide (MgO) and alumina (Al2O3) containing a glassy bond phase. A cladding layer ofzirconia or magnesia is then deposited on the furnace fixture substrate by plasma
deposition. The ceramic-based electronic component to be fired is placed on the zirconia-coated substrate; and heated to a desired temperature to heat treat the component.
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