专利名称:Method of forming integrated optical circuit
planar waveguide turning mirrors
发明人:Presby, Herman Melvin申请号:EP98307240.6申请日:19980908公开号:EP0903596B1公开日:20020306
摘要:Planar waveguide turning mirrors in integrated optical circuits (150) are formedusing at least one light beam (140) including a wavelength in a particular wavelengthrange that is absorbed by the cladding layer (160) of the circuit to vaporize a particularregion of the corresponding cladding layer at the desired angle to form the recessedlight deflector surface of the turning mirror. In addition, it is also possible to form thecladding layer on a substrate comprising a material that enables light wavelengths in theparticular wavelength range to be substantially transmitted through the substrate toadvantageously enable greater flexibility in the light beam energy and/or the time thebeam is incident on the cladding layer during the vaporization process.
申请人:LUCENT TECHNOLOGIES INC
地址:US
国籍:US
代理机构:Williams, David John
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